학술논문
Anodic characteristic during anodizing of electron-beam evaporation Aluminum film on Si substrate
Document Type
Article
Author
Source
In: Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors . (Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, March 2000, 21(3):255-259)
Subject
Language
English
ISSN
02534177