학술논문
Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering
Document Type
Article
Author
Source
In: Journal of Materials Science: Materials in Electronics . (Journal of Materials Science: Materials in Electronics, May 2022, 33(15):12271-12280)
Subject
Language
English
ISSN
1573482X
09574522
09574522