학술논문

Quantification of Crystalline Phases in Hf0.5Zr0.5O2 Thin Films through Complementary Infrared Spectroscopy and Ab Initio Supercell Simulations
Document Type
Article
Source
In: ACS Applied Materials and Interfaces. (ACS Applied Materials and Interfaces, 2023)
Subject
Language
English
ISSN
19448252
19448244