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Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

Document Type

Article

Author

Vohánka, J.; Buršíková, V.; Šklíbová, V.; Homola, V.; Franta, D.; Čermák, M.; Ohlídal, I.; Šustek; Šulc, V.; Ohlídal, M.

Source

In: Applied Surface Science. (Applied Surface Science, 30 December 2020, 534)

Subject

Language

English

ISSN

01694332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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