학술논문

BEOL compatible high retention perpendicular SOT-MRAM device for SRAM replacement and machine learning
Document Type
Conference
Source
2021 Symposium on VLSI Technology VLSI Technology, 2021 Symposium on. :1-2 Jun, 2021
Subject
Bioengineering
Computing and Processing
Photonics and Electrooptics
Power, Energy and Industry Applications
Performance evaluation
Resistance
Critical current density (superconductivity)
Nonvolatile memory
Random access memory
Switches
Machine learning
Language
ISSN
2158-9682
Abstract
Spin orbit torque-MRAM devices are promising both for high performance cache replacement and for low power neural networks requiring non-volatile weights, such as analog in-memory compute (AiMC). Using a new free layer design, we demonstrate a BEOL compatible perpendicular SOT device with high retention and excellent switching efficiency. ∆ > 75 k B T is reported for 50nm devices at 125°C operating temperatures with critical current < 400µA at 1ns. This concept offers a flexible way to adjust ∆ and to exploit advanced SOT material both for high performance and machine learning (ML) applications.