학술논문

Impacts of Ta Buffer Layer and Cu–Ge–Te Composition on the Reliability of GeSe-Based CBRAM
Document Type
Periodical
Source
IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 66(12):5133-5138 Dec, 2019
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Buffer layers
Electrodes
Random access memory
Resistance
Voltage measurement
Electrolytes
Switches
Buffer layer
conductive bridge random access memory (CBRAM)
Cu
GeSe
retention
resistive random access memory (RRAM)
Ta
Language
ISSN
0018-9383
1557-9646
Abstract
We analyze the switching and retention properties of 65-nm integrated Cu(-Ge-Te)/(Ta)/GeSe conductive bridge random access memory devices operated at $50~\mu \text{A}$ . We evidence the crucial role played by a Ta buffer layer inserted between the Cu alloy and GeSe layers in decreasing the preforming current and in significantly improving the low-resistance state retention. Cu alloys of different compositions are tested to reveal lower device variability and longer retention with Cu 2 GeTe 3 active electrode.