학술논문
Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution
Document Type
Conference
Author
Source
2010 First International Conference on Sensor Device Technologies and Applications Sensor Device Technologies and Applications (SENSORDEVICES), 2010 First International Conference on. :190-194 Jul, 2010
Subject
Language
Abstract
We developed a home-made Sample-Holder Unit used for 2D nano-positionning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.