학술논문
Recent advances in UV and VUV cleaning of optical materials
Document Type
Conference
Source
2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601) Optoelectronic and microelectronic materials and device Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on. :205-208 2002
Subject
Language
ISSN
1097-2137
Abstract
An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using short-pulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.