학술논문
Design of graphene-based MEMS intracranial pressure sensor
Document Type
Conference
Author
Source
2016 IEEE International Symposium on Medical Measurements and Applications (MeMeA) Medical Measurements and Applications (MeMeA), 2016 IEEE International Symposium on. :1-5 May, 2016
Subject
Language
Abstract
The present paper utilises COMSOL Multiphysics to model structural application of graphene as pressure sensor diaphragm. In this study, deflection and strain induced in a graphene diaphragm due to applied pressure were calculated. Pressure operation of the sensor is divided into two ranges, namely normal pressure and abnormal pressure to find the suitable design for these different pressure ranges. Changes in the band structure can be detected electrically, suggesting a potential application as the ultra-sensitive pressure sensor. This study has paved a new path to discover the feasibility of utilising the thinness of graphene membrane in MEMS piezoresistive pressure sensor specifically in intracranial pressure monitoring.