학술논문
Radio frequency power sensor based on MEMS technology with ultra low loss
Document Type
Conference
Source
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. Micro electro mechanical systems Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on. :191-194 2005
Subject
Language
ISSN
1084-6999
Abstract
A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.