학술논문
High-Q Resonators on Single Crystal Aluminum Nitride Grown by Molecular Beam Epitaxy
Document Type
Conference
Author
Source
2019 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2019 Conference on. :1-2 May, 2019
Subject
Language
Abstract
We report the demonstration of high-Q (> 70,000) microring resonators at 770 nm wavelength using single crystal aluminum nitride (AlN) grown by molecular-beam-epitaxy (MBE) which is a crucial growth technique enabling electronic/photonic integration with III-Nitrides. © 2019 The Author(s)