학술논문

Carbon doped SiGe heterojunction bipolar transistor module suitable for integration in a deep submicron CMOS process
Document Type
Conference
Source
2000 Asia-Pacific Microwave Conference. Proceedings (Cat. No.00TH8522) Asia-Pacific microwave conference Microwave Conference, 2000 Asia-Pacific. :757-762 2000
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Aerospace
Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Silicon germanium
Germanium silicon alloys
Heterojunction bipolar transistors
Boron
Bipolar transistors
CMOS process
Frequency
Degradation
CMOS technology
Art
Language
Abstract
The incorporation of low concentrations of carbon (