학술논문

Planar antennas for detection of 340 GHz band with single Si metal-oxide-semiconductor field-effect transistors
Document Type
Conference
Source
2011 International Conference on Infrared, Millimeter, and Terahertz Waves Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on. :1-2 Oct, 2011
Subject
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Engineered Materials, Dielectrics and Plasmas
Components, Circuits, Devices and Systems
MOSFETs
Detectors
Antennas
Substrates
Silicon
Logic gates
Language
ISSN
2162-2027
2162-2035
Abstract
A set of planar antennas was numerically designed to optimize detection of 340 GHz with Si MOSFETs. A series of MOSFETs monolithically coupled with different types of slot antennas was fabricated and tested as room temperature detectors. The MOSFETs of different sizes were fabricated on a SOI substrate thinned down to 40 μm. We observed a photovoltaic non-resonant detection signal and its strong dependence on the modulation frequency of the incident beam. We found that the signal does not strongly depend on geometrical parameters of MOSFETs.