학술논문

SOI active pixel detectors of ionizing radiation - technology & design development
Document Type
Conference
Source
2003 IEEE Nuclear Science Symposium. Conference Record (IEEE Cat. No.03CH37515) Nuclear science symposium Nuclear Science Symposium Conference Record, 2003 IEEE. 1:365-367 Vol.1 2003
Subject
Nuclear Engineering
Power, Energy and Industry Applications
Fields, Waves and Electromagnetics
Engineered Materials, Dielectrics and Plasmas
Radiation detectors
Ionizing radiation
Silicon on insulator technology
CMOS technology
Testing
Substrates
Circuits
Manufacturing
Conductivity
Semiconductor films
Language
ISSN
1082-3654
Abstract
This paper addresses the development of a novel monolithic active pixel image sensor based on SOI technology. The test active pixel matrices have been recently manufactured and are under extensive examination. The paper describes an idea of the device and shows the most recent test results.