학술논문
Patterning SiO/sub 2/ layer using molecular transfer lithography (MxL)
Document Type
Conference
Author
Source
Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International. :72-73 2004
Subject
Language
Abstract
Molecular Transfer Lithography (MxL) is a recent class of printing techniques using a water dissolvable transfer mold and includes a form of imprint lithography as one application [ 1,2].