학술논문

The influence of dummy fills on an on-chip spiral inductor and their optimized placement scheme
Document Type
Conference
Source
2008 Asia-Pacific Microwave Conference Microwave Conference, 2008. APMC 2008. Asia-Pacific. :1-4 Dec, 2008
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Aerospace
Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Spirals
Inductors
Wires
Magnetic fields
Frequency
Magnetic field measurement
Capacitance
Silicon
Circuits
CMOS process
Language
ISSN
2165-4727
2165-4743
Abstract
A new dummy fill placement scheme which has a forbidden area in the vicinity of and underneath the inductor wires of an on-chip spiral inductor is proposed. Experimental results showed no degradation in either the Q value or the resonant frequency for the proposed scheme.