학술논문

Up-Scaling Process of Thin Film Silicon Solar Cells and Modules in Industrial PECVD KAI Systems
Document Type
Conference
Source
2006 IEEE 4th World Conference on Photovoltaic Energy Conference Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference on. 2:1720-1723 May, 2006
Subject
Photonics and Electrooptics
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Power, Energy and Industry Applications
Semiconductor thin films
Photovoltaic cells
Inductors
Amorphous silicon
Transistors
Crystallization
Costs
Substrates
Zinc oxide
Production equipment
Language
ISSN
0160-8371
Abstract
Amorphous silicon p-i-n solar cells and modules have been developed in small R&D KAI reactors. Test cells of 0.25 mm thick i-layer exceed 10% initial efficiencies and stabilized ones of 8.2%. The a-Si:H deposition process is successfully transferred to industrial size substrates of 1.4 m2 area resulting in initial module powers of 106.4 W using a commercial TCO front AFG and, recently, 104.1 W using in-house developed LPCVD front ZnO. For both modules our in-house LPCVD ZnO has been applied as back contact. The former large-area module passed successfully the damp-heat test. Entirely microcrystalline p-i-n cells with an efficiency of 8.5% could be prepared in a single-chamber KAI-S reactor. Micromorph tandems resulted in initial cell efficiencies of 10.7%, whereas minimodules lead to initial aperture efficiencies of 10.2%.