학술논문
Microaccelerometer based on surface acoustic waves
Document Type
Conference
Source
Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2014 Symposium on. :18-21 Oct, 2014
Subject
Language
Abstract
This paper proposes an idea of an accelerometer based on surface acoustic waves. Such devices should be able to survive high shocks (up to 65 000 g) and still be small, energy efficient and low-cost. Theory basics, design concepts, experimental and modeling results are discussed.