학술논문

Low Noise Global Shutter Image Sensor Working in the Charge Domain
Document Type
Periodical
Source
IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 40(2):310-313 Feb, 2019
Subject
Engineered Materials, Dielectrics and Plasmas
Components, Circuits, Devices and Systems
Logic gates
Photodiodes
Micromechanical devices
Charge transfer
Dark current
CMOS image sensors
Image sensor
global shutter
pinned photodiode
deep trench capacitor
Language
ISSN
0741-3106
1558-0563
Abstract
In this letter, we present global shutter (GS) pixel using active deep trench isolation gate to transfer and store photodiode charge signal into a fully depleted pinned MOS capacitance. This architecture is compatible with conventional correlated double sampling. GS readout noise lower than 2e- is demonstrated. The fully depleted pinned capacitance is able to store 12ke- with dark current lower than 25e-/s at 60 °C. The GS efficiency, better than 99.96% at 550nm, is reported.