학술논문
RF detection for low frequency cMUTS and its comparison to traditional detection
Document Type
Conference
Author
Source
2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121) Ultrasonics symposium Ultrasonics Symposium, 2000 IEEE. 1:935-938 vol.1 2000
Subject
Language
ISSN
1051-0117
Abstract
Capacitive micromachined transducers have long been used as generators and detectors of ultrasound both in air and immersion applications. Typically, the frequency of operation has been in the MHz range. However, they can still be operated at very low frequencies, where their mechanical sensitivity is poor, but the frequency response is flat. In this paper we show that, together with the RF detection method that provides a very sensitive and broadband acoustic detection, it is possible to operate the cMUTs at very low frequencies, which covers the microphone and sonar applications.