학술논문

On the Advantages of Using a Strong Coupling Variational Formulation to Model Electro-Mechanical Problem
Document Type
Conference
Source
EuroSime 2006 - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on. :1-8 2006
Subject
Computing and Processing
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Signal Processing and Analysis
General Topics for Engineers
Voltage
Capacitors
Electrodes
Micromechanical devices
Fluid dynamics
Couplings
Springs
Equations
Vibrations
Frequency
Language
Abstract
This paper presents the advantages of a strong coupled formulation to model the electro-mechanical coupling appearing in MEMS. Usually the classical softwares use a staggered methodology iterating between two different codes to obtain the solution of the coupled problem. In this research a strong coupled formulation is proposed and a tangent stiffness matrix of the whole problem is computed. Using this matrix, nonlinear algorithms such as the Riks-Crisfield algorithm may be applied to solve the static nonlinear problem and determine accurately the static pull-in voltage. Moreover, the natural frequencies may be computed around each equilibrium positions. The dynamic behaviour of the structure may also be studied and two new parameters are defined: the dynamic pull-in voltage and the dynamic pull-in time. This strong coupled methodology deriving from variational principle may also be used for topology optimisation and extended finite elements.