학술논문
Diagnostics and modeling of RF discharge dissociation in N/sub 2/O
Document Type
Periodical
Source
IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 19(2):278-285 Apr, 1991
Subject
Language
ISSN
0093-3813
1939-9375
1939-9375
Abstract
Measurements were made of the RF discharge dissociation of N/sub 2/O in a parallel-plate reactor by downstream mass spectrometry using a wide range of gas flows and powers at 10 kHz and 13.56 MHz. The results show that the mass 44 signal (N/sub 2/O/sup +/), which is a measure of the amount of undissociated N/sub 2/O, is a function of the discharge input energy per N/sub 2/O molecule (eV/N/sub 2/O). A plug flow, rate equation model of the discharge was used to predict the experimental dissociation rates. A DC Monte Carlo simulation was used to calculate rate coefficients for electron-impact neutral dissociation, ionization, and dissociative ionization. The rate equation model also includes reactions among the dissociation products of N/sub 2/O and species which are synthesized in the discharge, as well as neural and electron-ion recombination at the electrodes. The model predictions identify the major reaction pathways and the sensitivities of the results to the rate coefficient values used.ETX