학술논문
Towards subvolt and half-mm scale silicon MOS-capacitor MZI modulators
Document Type
Conference
Author
Source
2023 IEEE Silicon Photonics Conference (SiPhotonics) Silicon Photonics Conference (SiPhotonics), 2023 IEEE. :1-2 Apr, 2023
Subject
Language
ISSN
1949-209X
Abstract
We report the demonstration of sub-mm scale silicon lateral MOS-capacitor MZI modulators operating at > 100 Gb/s PAM-4. The 3D packaged transmitter demonstrates an RF swing of 1.2Vpp and a TDECQ of 1.7 dB for MZI with a total active length of 600 µm.