학술논문
Hybrid integration of VCSELs and microlenses for a particle detection microoptical system
Document Type
Conference
Source
2015 10th Spanish Conference on Electron Devices (CDE) Electron Devices (CDE), 2015 10th Spanish Conference on. :1-4 Feb, 2015
Subject
Language
ISSN
2163-4971
Abstract
We introduce the design and fabrication of a microoptical system of reduced dimensions, based on hybrid integration of commercial components (i.e. VCSELs and microlenses) through silicon micromachining. We demonstrate the feasibility of integrating these components with the aim of providing up to 4 collimated or focused laser beams. The application for this system will be the detection of microparticles in a 4 parallel measurement process.