학술논문
Transfer-print integration of GaAs p-i-n photodiodes onto silicon nitride photonic integrated circuits
Document Type
Conference
Author
Source
2020 IEEE Photonics Conference (IPC) Photonics Conference (IPC), 2020 IEEE. :1-2 Sep, 2020
Subject
Language
ISSN
2575-274X
Abstract
We demonstrate the integration of GaAs p-i-n photodiodes onto silicon nitride grating couplers by means of transfer-printing. Dark currents below 20 pA and waveguide-coupled responsivities of 0.30 A/W are obtained. The detectors are integrated with an on-chip near-infrared spectrometer.