부산대학교 도서관

Model of arc discharge current at the metal vapors and active gases, which is ignited for physical evaporation and deposition of ceramic films, is proposed and analyzed in the paper. In proposed model spatial charge of ions and electrons is defined on the base of the equation of continuity of corresponded particles flows. Such type of discharges can be used in production of electronic components for deposition high-quality dielectric films. This technology of films deposition is generally oriented to applying of high voltage glow discharge electron guns. As a result of solving the simulation task the current-voltage characteristic of non-self-sustained arc discharge have been obtained and analyzed.