학술논문
Stability improvement of Therma-Wave signal by pre-annealing
Document Type
Conference
Author
Source
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Ion implantation technology proceedings Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on. :252-255 2002
Subject
Language
Abstract
In this study, we investigated causes of fluctuation of Therma-Wave(TW) signals in order to improve the stability of TW signal measurement. In case of heavy ion implantation, several causes were found, and pre-annealing before implantation showed the most effective contribution to improve the fluctuation. It is from 2.13% to 0.41% (1σ) in case of In + implantation. This paper presents innovative improvement of the TW signal stability by the pre-annealing and other methods.