학술논문
Photoplott based masking alternatives for use in micromechanics, microoptics and microelectronics
Document Type
Conference
Author
Source
Proceedings. International Semiconductor Conference Semiconductor conference Semiconductor Conference, 2002. CAS 2002 Proceedings. International. 2:335-338 vol.2 2002
Subject
Language
Abstract
This paper reports on different ways to use photoplot type films in the field of microtechnologies. Three such possibilities are presented below: direct contact masking; reticles for projection objectives (1:5 and 1:10); mask fabrication based on scale reduction of a photoplot type film.