학술논문

Design of silicon-pTMDS bio-MEMS with millimeter and sub-millimeter waves transducers
Document Type
Conference
Source
34th European Microwave Conference, 2004. Microwave Conference, 2004. 34th European. 1:169-172 2004
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Aerospace
Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Transducers
Polymers
Silicon
Microelectronics
Microfluidics
Food technology
Millimeter wave technology
Biosensors
Chemical technology
Fabrication
Language