학술논문
Propagation and scattering in a microwave plasma chamber
Document Type
Conference
Author
Source
2015 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting Antennas and Propagation & USNC/URSI National Radio Science Meeting, 2015 IEEE International Symposium on. :280-281 Jul, 2015
Subject
Language
ISSN
1522-3965
1947-1491
1947-1491
Abstract
The paper presents the analysis of propagation and scattering in a microwave plasma chamber. The chamber consists of a looped circular waveguide with the TE11 mode excited by the TE10 mode from a linear rectangular waveguide. The microwave power extracted through a slit along the cavity wall that is lined by quartz permeates the oxygen injected in the center and ionized by 50,000 volts hence creating plasma. The complexity of the scattering of the field through the quartz and propagating in the plasma provides several challenges to obtaining a uniform field distribution within the chamber. A nonlinear Drude model of the plasma in CST (Computer Simulation Technology) has been developed to analyze the scattered field in the plasma region.