부산대학교 도서관

Traditional modeling of systems, for dynamic analyses, involves formulation of a second order differential equation. This method is an approximation for the actual behaviour of the system. Calculating equivalent second order coefficients can result in inaccuracies due to approximations at different stages of modeling. This paper presents a simple solution for simulation of a Micro-Electro-Mechanical simply supported beam with a point load. The model has been compiled in circuit simulation framework. The solution assumes a quasi static behaviour due to low operating frequency of the beam. Static and transient deflection analyses have been performed. Equivalent capacitance offered by a deflected beam has also been calculated.