학술논문
A new robustness optimization methodology for MEMS-IC systems
Document Type
Conference
Source
2017 14th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2017 14th International Conference on. :1-4 Jun, 2017
Subject
Language
Abstract
MEMS based sensor circuits are traditionally designed separately using CAD tools specific to each energy domain (mechanical and electrical). This paper presents a new approach for the robustness optimization of a MEMS-IC system. The new methodology is exemplified for a MEMS microphone with readout circuit. The design parameters of both the MEMS and the IC part are subject to optimization. Advanced methods for robustness analysis and optimization in consideration of operating and process parameters, developed for ICs, are transferred to MEMS based sensor circuits. The optimization succeeds only when considering both mechanical and electrical parameters. To save CPU time, a reduced-order model is used for the MEMS part. To integrate the generation of the simplified model into the optimization flow, a new simulation-in-a-loop flow based on commercial tools is implemented.