학술논문

Thickness dependence of dielectric nonlinearity of lead zirconate titanate films
Document Type
Periodical
Source
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control IEEE Trans. Ultrason., Ferroelect., Freq. Contr. Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on. 57(8):1717-1723 Aug, 2010
Subject
Fields, Waves and Electromagnetics
Titanium compounds
Dielectric thin films
Dielectric constant
Lead
Polarization
High-K gate dielectrics
Language
ISSN
0885-3010
1525-8955
Abstract
The first-order reversal curves (FORC) distribution of PbZr 0.52 Ti 0.48 O 3 thin films was characterized as a function of film thickness. It was found that the thickness dependence of the small-field dielectric constant is due primarily to differences in the domain wall contributions to the properties. The irreversible FORC distribution decreased and the switching fields increased as the thickness decreased; this is compatible with reported Rayleigh analyses. The polarization-electric field data and the ac field dependence of the dielectric constant were modeled using the FORC distributions, and were found to give a good fit to the experimental results. Some discrepancies remain in the high-field dielectric constant, probably caused by its definition.