학술논문
Inductively coupled wirebonded microcoils for wireless on-chip NMR
Document Type
Conference
Author
Source
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :2798-2800 Jun, 2011
Subject
Language
ISSN
2159-547X
2164-1641
2164-1641
Abstract
We report for the first time single-chip MEMS-integration of a resonant LC-circuit for wireless magic angle coil spinning (MACS) NMR. The chip consists of a wirebonded 3D microcoil, an interdigitated capacitor and a sample container. The LC-circuit resonates at 700MHz for 1 H spectroscopy in 16.4T magnetic field. The microcoil is inductively coupled with the probe-coil of the spectrometer. We prove the high sensitivity of the setup by detecting the NMR signal from 0.3nl H 2 O in a mixture with deuterium oxide (0.1% H 2 O: 99.9% D 2 O) with an SNR=8.5 in one scan.