학술논문

Structure and Surface Properties of Magnetron Sputtered Tantalum Oxynitride Coatings for Biomedical Applications
Document Type
Conference
Source
2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP) Nanomaterials: Applications & Properties (NAP), 2021 IEEE 11th International Conference. :1-5 Sep, 2021
Subject
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Tantalum
Surface resistance
Surface roughness
Surface topography
Rough surfaces
Coatings
Steel
magnetron sputtering
tantalum oxynitride coatings
roughness
wettability
biocompatibility
Language
Abstract
Antimicrobial properties and thrombotic resistance of modern biomaterials depend on the composition and surface properties, such as roughness, topography and wettability. Tantalum oxynitrides demonstrate a wide range of modifications in the structure and elemental composition. Results show the effect of deposition conditions on the structure and surface properties of tantalum oxynitrides and further correlation with the biological response of TaON films in vitro tests.