학술논문

Emerging Memory RRAM Embedded in 12FFC FinFET Technology for industrial Applications
Document Type
Conference
Source
2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023
Subject
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Nuclear Engineering
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Technological innovation
Monte Carlo methods
FinFETs
Reliability
Optimization
Next generation networking
Logic arrays
Language
ISSN
2156-017X
Abstract
In this work, an embedded RRAM array extending from 40/28nm logic to 12FFC FinFET technology is firstly demonstrated. Based on comprehensive reliability analysis on 28nm RRAM. we are able to identify the failure mode of 12FFC RRAM swiftly and address it through design solutions and write algorithm optimization. The physical origin of SET failure can be attributed to filament contraction and validated by 2D Monte-Carlo simulation. This finding provides a valuable insight on write algorithm innovation to achieve 10K endurance, more than 105°C/10yr retention, and 3x reflow capability, enabling next generation high-density embedded memory for industrial application.