학술논문

Fast-Response Thin Film Heat Flux Sensors for Harsh Environments
Document Type
Periodical
Source
IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 24(12):18844-18850 Jun, 2024
Subject
Signal Processing and Analysis
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Robotics and Control Systems
Sensors
Heating systems
Temperature sensors
Temperature measurement
Resistance heating
Resistance
Substrates
Fast response
high temperature
inclined structure
thin film heat flux sensor
transverse thermoelectric (TTE) effect
Language
ISSN
1530-437X
1558-1748
2379-9153
Abstract
Accurately monitoring heat flux distribution can enhance the service stability of aeroengine hot-end components. The extreme environmental temperature and fast heat transfer between high-speed load and hot components propose serious requirements for heat flux sensors, including high-temperature resistance and fast response. This article fabricates the fast response thin film heat flux sensor based on the transverse thermoelectric (TTE) effect of La1−x CaxMnO3 (LCMO). The TTE heat flux sensor shows excellent high-temperature resistance at 1000 °C. After high-temperature heat treatment for 1 h, the performance of the sensor is improved due to the optimization of the crystal quality and biaxial texture of the LCMO thin film, as well as the reduction of resistance. The sensitivity increases from 7.39 to $7.79~\mu $ V/(kW/m2), and the response time reduces from 58 to 42 ns. Then, the performance of the thin film heat flux sensor shows little changes after completing high-temperature heat treatment for up to 7 h at 1000 °C. The TTE heat flux sensor can show a satisfied response in a high-temperature environment at 1000 °C, with a sensitivity of $1.18~\mu $ V/(kW/m2) without the consideration of laser absorption. The TTE heat flux sensor exhibits stable high-temperature resistance at 1000 °C and can operate normally at 1000 °C, indicating its potential in fast heat flux measurement for harsh environments.