학술논문
High-bandwidth silicon micro-ring modulator employing low-loss waveguide bends
Document Type
Conference
Author
Source
2023 28th Microoptics Conference (MOC) Microoptics Conference (MOC), 2023 28th. :1-2 Sep, 2023
Subject
Language
Abstract
We employ a low-loss waveguide bend design having gradually-changed width and bending radius to realize a high-speed silicon micro-ring modulator (MRM) for o-band. The resultant silicon MRM enables a tuning efficiency of 35 pm/V, a quality factor of 5020, and an electro-optic bandwidth of 55 GHz.