학술논문
High Temperature Operation of Membrane Photonic Integrated Circuits with Buried-Ridge-Waveguide on Si
Document Type
Conference
Author
Source
2022 28th International Semiconductor Laser Conference (ISLC) Semiconductor Laser Conference (ISLC), 2022 28th International. :1-2 Oct, 2022
Subject
Language
Abstract
We demonstrate a membrane photonic integrated circuit consists of membrane DFB laser and p-i-n photodiodes with buried-ridge-waveguide bonded on Si by a-Si assisted room-temperature surface-activated bonding. Over 1 mA photocurrent was detected and 25 Gbps data transmission was achieved at 25 °C.