학술논문

A Stretchable High-Density Electromyography Mems Sensor for Efficient Silent Speech Recognition
Document Type
Conference
Source
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :360-363 Jan, 2024
Subject
Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Electrodes
Micromechanical devices
Surface impedance
Speech recognition
Electromyography
Reliability
Strain
High-density surface electromyography
MEMS
High stretchability
Hyaluronic acid hydrogel
Silent speech recognition
Language
ISSN
2160-1968
Abstract
This paper reports a novel high-density surface electromyography (HD-sEMG) MEMS sensor with high stretchability for silent speech recognition. A 21-channel annular sector-shaped electrode array is proposed with the serpentine structure to realize flexible interconnection, which can be repeatedly stretched under 40% strain without failure, perfectly adapting to the skin strain of the lower jaw and ensuring the movement of muscles without restriction. The sensor can achieve tight adhesion by modifying electrodes with self-adhesive hyaluronic acid hydrogel and the skin-electrode contact impedance is reduced six-fold compared to the dry electrode. From the results of the collection of signals, it is obvious that the envelopes have similar characteristic peaks and valleys when speaking the same word, but differ when speaking different words. This high-density electrode array improves the spatial resolution of signal acquisition to reliably provide multi-channel muscle activation information and has great potential in the application of achieving efficient silent speech recognition (SSR).