학술논문
High efficiency filtered vacuum-arc plasma source
Document Type
Conference
Author
Source
XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on. 2:491-494 2004
Subject
Language
ISSN
1093-2941
Abstract
Cathodic vacuum arc plasma source with B magnetic filter, which turns the plasma stream 90°, is described. T-shaped plasma duct with a system of intercepting screens and fins provides a significally higher degree of absorption of macroparticles when compared to conventional "toroidal" filters (more than an order of magnitude). A small ratio of curvature radius of the plasma duct to its inner radius, a large diameter of the plasma guiding channel (200 mm), and an optimal geometry of transporting magnetic fields ensure a high throughput of the filter - up to 55%.