학술논문

Comparison of Electro-Optical Characteristics of Simulated and Fabricated InGaN/ GaN MQWs Green Light Emitting Diodes on c-Plane Sapphire
Document Type
Conference
Source
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2024 8th IEEE. :1-3 Mar, 2024
Subject
Bioengineering
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Fabrication
Radiative recombination
Light emitting diodes
Threshold voltage
Software
Wide band gap semiconductors
Indexes
RIE
Contact fabrication
IQE
Emission Power
Language
Abstract
We present the simulation and fabrication with characterization of InGaN MQWs based green LEDs on c-plane sapphire substrate in this paper. The simulated results show that internal quantum efficiency droop has improved from 13% in reference structure to 4% in the modified structure at 200 A/cm 2 current density with replacement of the 15 nm AlGaN step index EBL with a super-lattice pair of graded AlGaN EBL following a reduction in droop, polarization charges and increment in hole injection towards active region.