학술논문
Thin-film IR absorbers with high absorbance and easy preparation and integration
Document Type
Conference
Author
Source
2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on. :39-42 Aug, 2013
Subject
Language
ISSN
1944-9399
Abstract
Thin-film infrared (IR) radiation absorbers are widely used in thermal detectors, and high IR absorption in a wide spectral range is critical to improve the sensitivities of the detectors. In this work, three types of thin-film IR absorbers were prepared and the absorption characteristics were tested. 1 µm thick Styrene Butadiene Styrene block polymer (SBS) decorated multiwall carbon nanotube (MWNT) films, prepared via solution coating, indicate an average absorbance of 92% in the spectral range of 8 ∼ 14 µm. 1.5 µm thick nanostructured Cr thin-films, obtained by sputtering at a high incident angle of 110°, reveal an absorbance of 55% at 8 µm which decreases linearly to 35% at 14 µm. 4 µm thick carbonized photoresist thin-films, formed by ion beam etching, imply an absorbance of 83% at 8 µm which declines monotonously to 57% at 14 µm. All the thin-film IR absorbers are easy to fabricate and integrate into thermal detectors without need of specific equipment. The SBS decorated MWNT thin-films show the highest IR absorbance and the best uniformity of spectral response in 8 ∼ 14 µm, indicating that they are most suitable to be used as an IR absorber in IR detectors.