학술논문

Thin-film IR absorbers with high absorbance and easy preparation and integration
Document Type
Conference
Source
2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on. :39-42 Aug, 2013
Subject
Bioengineering
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
Fields, Waves and Electromagnetics
General Topics for Engineers
Nuclear Engineering
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Films
Scattering
Absorption
Resists
Detectors
Substrates
Optical surface waves
Language
ISSN
1944-9399
Abstract
Thin-film infrared (IR) radiation absorbers are widely used in thermal detectors, and high IR absorption in a wide spectral range is critical to improve the sensitivities of the detectors. In this work, three types of thin-film IR absorbers were prepared and the absorption characteristics were tested. 1 µm thick Styrene Butadiene Styrene block polymer (SBS) decorated multiwall carbon nanotube (MWNT) films, prepared via solution coating, indicate an average absorbance of 92% in the spectral range of 8 ∼ 14 µm. 1.5 µm thick nanostructured Cr thin-films, obtained by sputtering at a high incident angle of 110°, reveal an absorbance of 55% at 8 µm which decreases linearly to 35% at 14 µm. 4 µm thick carbonized photoresist thin-films, formed by ion beam etching, imply an absorbance of 83% at 8 µm which declines monotonously to 57% at 14 µm. All the thin-film IR absorbers are easy to fabricate and integrate into thermal detectors without need of specific equipment. The SBS decorated MWNT thin-films show the highest IR absorbance and the best uniformity of spectral response in 8 ∼ 14 µm, indicating that they are most suitable to be used as an IR absorber in IR detectors.