학술논문
Failure mode analysis of al2O2-parylene c bilayer encapsulation for implantable devices and application to penetrating neural arrays
Document Type
Conference
Author
Source
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :1747-1750 Jun, 2015
Subject
Language
ISSN
2159-547X
2164-1641
2164-1641
Abstract
We assess the performance of a parylene C - aluminum oxide bilayer encapsulation strategy as it applies to implantable devices with non-planar topography. Electrochemical measurements of devices subject to in vitro accelerated lifetime testing are analyzed to evaluate benefits of bilayer encapsulation versus parylene C alone. Failure modes associated with device features and topographies are identified and solutions are presented that promote stability of device impedances.