부산대학교 도서관

Authors of the paper propose and implement an approach to the fabrication of a flexible coplanar transmission line. The proposed approach is based on the utilizing the combination of the magnetron sputtering and pulsed laser ablation. Effective modes of micromachining by pulsed laser radiation of nanosecond duration, which allow selective removal of metallization from the surface of a flexible dielectric substrate (polyimide film) without damaging the substrate itself, are established. The design and numerical simulation of the electromagnetic characteristics of a coplanar transmission line were performed with the help of the Ansys Electromagnetics Suite. Several samples of a flexible coplanar transmission line have been fabricated using the proposed approach. Comparison of the results of the experimental investigation of the reflection and transmission losses with the numerical simulation data showed good qualitative and quantitative correspondence.