학술논문

Silicon Power Interposer Technology (PIT) for Integrated Power Converter
Document Type
Periodical
Source
IEEE Transactions on Power Electronics IEEE Trans. Power Electron. Power Electronics, IEEE Transactions on. 38(6):6755-6758 Jun, 2023
Subject
Power, Energy and Industry Applications
Aerospace
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
General Topics for Engineers
Nuclear Engineering
Signal Processing and Analysis
Transportation
Through-silicon vias
Inductors
Fabrication
Silicon
Three-dimensional displays
Substrates
Packaging
3-D packaging
microinductor
passive interposer
power supply in package (PSiP)
through-silicon via (TSV)
Language
ISSN
0885-8993
1941-0107
Abstract
Future generations of power converters must be miniaturized to power future electronic devices that are getting smaller and smarter. Monolithic integration is an ideal approach toward compact, efficient, and low-cost converters. This letter addresses two technology gaps in packaging technology and integrated inductor technology using the so-called power interposer technology (PIT). We implement a step-down power converter to demonstrate PIT. The converter uses two GaN FETs, capacitors, and a gate driver stacked on a 0.28-mm-thick silicon die that hosts a 3-D substrate-embedded toroidal microinductor. The converter switches 22 MHz in zero-voltage-switching mode, achieving a peak efficiency of 83% at the full load of 1 W. PIT has shown unique technology advantages for future generations of integrated power converters, including high power density, low profile, superior thermal performance, scalability, and heterogeneous integration. Furthermore, PIT holds great commercial potential for high-power-density integrated power converters.