학술논문
Coplanar differential capacitively coupled contactless conductivity detection (CD-C4D) sensor for micro object inside fluidic flow recognization
Document Type
Conference
Author
Source
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :1124-1127 Jun, 2017
Subject
Language
ISSN
2167-0021
Abstract
In this paper, we present a coplanar differential capacitively coupled contactless conductivity detection (CD-C4D) structure for the detection of tiny objects with dimension in micro scale. The differential capacitance changed due to the occurrence of an object in micro scale in is detected and used to recognize the presence as well as properties (i.e., electrical property and moving speed) of the object in fluidic flow. The experimental results and discussion in this paper can be generalized to any living cell or particle detection applications.