학술논문
Analysis of Linearity and Frequency Response of a Novel Piezoelectric Flextensional Actuator Using a Homodyne Interferometer and the $J_{1}{-}J_{4}$ Method
Document Type
Periodical
Source
IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 56(3):954-961 Jun, 2007
Subject
Language
ISSN
0018-9456
1557-9662
1557-9662
Abstract
Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the $J_{1}{-}J_{4}$ method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance.