학술논문
High-Performance Thin-Film Lithium Niobate Mach-Zehnder Modulator on 8-Inch Silicon Substrate
Document Type
Conference
Author
Source
2024 Optical Fiber Communications Conference and Exhibition (OFC) Optical Fiber Communications Conference and Exhibition (OFC), 2024. :1-3 Mar, 2024
Subject
Language
Abstract
We first report the thin-film lithium niobate (TFLN) electro-optic Mach-Zehnder modulator (MZM) on an 8-inch silicon substrate fabricated in the back-end-of-line (BEOL) of CMOS foundry. It operates at 1550 nm with electro-optical response of only 1.5 dB roll-off at 67 GHz.