학술논문

Self-Heating Gas Sensor Using Heterojunction Nanowire Array for High Sensitivity and Low Power Consumption
Document Type
Conference
Source
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :2181-2184 Jun, 2023
Subject
Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Robotics and Control Systems
Heating systems
Temperature sensors
Micromechanical devices
Temperature distribution
Sensitivity
Power demand
Transducers
Gas sensor
heterojunction
nanowire
low power consumption
uniform temperature distribution
Language
ISSN
2167-0021
Abstract
This paper reports a novel heterojunction nanowire array for a self-heating gas sensor with high sensitivity and low power consumption. Compared to the conventional self-heating gas sensors where the entire device is made up of a single sensing material, the proposed method employs an innovatively constructed metal/metal-oxide/metal (M-O-M) heterojunction design. The metal nanowires on both ends of the metal-oxide nanowires not only elongate the thermal heat loss pathway but also allow thermal activation at the sensing region to its entirety, resulting in low power consumption and high/stable gas responsivity. We theoretically and experimentally demonstrated that the proposed design operates with about 5-times lower power consumption when compared to that of the conventional design. Additionally, in comparison to its predecessor, the heterojunction architecture achieved about 2.5-times higher sensitivity while also showing stable recovery after each exposure to toxic gas.